| PWM静电伺服技术在电容微加速度计中的应用 |
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| 引用本文： | 金翠云,李一博,李健,靳世久.PWM静电伺服技术在电容微加速度计中的应用[J].航空精密制造技术,2002,38(6):37-39. |
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| 作者姓名： | 金翠云 李一博 李健 靳世久 |
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| 作者单位： | 天津大学精密仪器与光电子工程学院,天津,300072 |
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| 摘 要： | 根据实际条件,选用了PWM脉宽调制技术作为电容式加速度计静电平衡回路的实现方法。该方法与其他方法相比,更易于实现,而且整体组成也较为简单。
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| 关 键 词： | PWM静电力平衡 电容 加速度计 |
| 文章编号： | 1003-5451(2002)06-37-03 |
| 修稿时间： | 2002年10月21 |
PWM Electrostatic Servo Technique Applying on Capacitive Acceleration Micro-sensors |
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| Jin Cuiyun,Li Yibo,Li Jian,et al.PWM Electrostatic Servo Technique Applying on Capacitive Acceleration Micro-sensors[J].Aviation Precision Manufacturing Technology,2002,38(6):37-39. |
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| Authors: | Jin Cuiyun Li Yibo Li Jian |
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| Abstract: | Capacitive acceleration micro-sen sor has greatapplication prospect f or its many advantages such as highsensitivity,good stability,l ow temperature shift and low power consumption.The closed-loop accelerometer is main development orientation.Base d on practical condition,PWM(pulse width modulation)technique is chosen as the method to realize electrostatic balanced termination on capacitive acceleration micro-sensor.This me thod is easier and simpler than other method s. |
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| Keywords: | pulse width modulation electrosta tic balance capacitive accelerom eter |
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