| 熔石英元件纳米射流超光滑抛光流场仿真与实验 |
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| 引用本文： | 杨平,彭文强,李圣怡,石峰.熔石英元件纳米射流超光滑抛光流场仿真与实验[J].航空精密制造技术,2016(4):4-9. |
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| 作者姓名： | 杨平 彭文强 李圣怡 石峰 |
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| 作者单位： | 国防科学技术大学机电工程与自动化学院,长沙,410073 |
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| 基金项目： | 国家自然科学基金资助项目(61505259) |
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| 摘 要： | 利用计算流体力学软件Fluent对纳米颗粒射流超光滑加工的流场分布特点进行了流体动力学分析。基于仿真结果对去除函数的变化规律进行了研究，通过具体实验来对流体动力学仿真结果进行了验证。搭建了纳米射流抛光装置，利用该装置对熔石英元件进行了加工。原子力显微镜观测结果表明熔石英元件表面粗糙度RMS值由初始的0.680nm减小到了0.307nm，实现了超光滑加工。
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| 关 键 词： | 纳米胶体射流 流场分析 熔石英 超光滑 |
Flow Field Simulation and Experimental of Nanoparticle Jet Ultra-Smooth Polishing for Fused Silica Workpiece |
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| Abstract: | The lfow ifeld distribution features of nanoparticle jet ultra-smooth polishing were analyzed by using Fluent of the computer lfuid dynamics software. According to the simulation results, the variation rules of removal function were summarized. The simulation results were veriifed through the speciifc experiment. By atomic force microscopy observing, surface roughness RMS of fused silica decreased from 0.680 nm to 0.307nm, achieving ultra-smooth processing. |
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| Keywords: | Nanoparticle jet polishing Flow ifeld analysis Fused silica ultra-smooth |
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