TiN薄膜微结构激光加工特性的研究

利用光纤激光加工系统研究了两个激光加工参数(扫描速度和激光功率)对TiN薄膜加工特性的影响,并采用白光干涉仪分析了两组参数对加工直线槽的槽深、堆积高度和槽底表面粗糙度的影响趋势,通过对比分析,优化了加工参数。结果表明光纤激光器在加工TiN薄膜微结构上存在着效率高、精度高的优势。

Study on Processing Characteristics of Laser Processing the Micro Structures of TiN Thin Film

Aiming at the study of practicability of laser machining generating micro structure on TiN thin films, the fiber laser has been used to study the machining characteristics by adjusting two major factors (scanning rate and power). The effect of laser machining parameters on the depth of grooves, the height of accumulation materials and the surface roughness of grooves bottom are measured and analyzed with the aid of white light interferometer. The optimal laser machining processing parameters are analyzed. The result shows that machining microstructure on TiN film with fiber laser has high efficiency and good precision.