光学加工射频中和器的结构设计和性能研究

研究了射频中和器的工作原理,并且设计了射频中和器结构,实现了射频中和器的稳定工作。实验结果表明:射频中和器能够稳定引出电子束,有效中和离子束;在射频中和器不启动时去除函数峰值去除率仅有6nm/min,射频中和器正常工作时去除函数峰值去除率达到了72.5nm/min;并且射频中和器的中和能力与空心阴极中和器相当。因此,射频中和器满足光学加工对中和能力的需求,具备应用于光学加工的能力。

Structure Design and Performance Research of RF Neutralizer for Optics Figuring

The RF (radio frequency) neutralizers' discharging principle was researched. The structure of the RF neutralizer was designed, The stable performance has been achieved. The experiment results indicated that the RF neutralizer can make a stable electron beam to effectively neutralize the ion beam, the peak removal efficiency of the removal function is only 6nm/min when the RF neutralizer doesn't work and it is 72.5nm/min when the RF neutralizer does work, and the neutralization ability of the RF neutralizer is comparable to that of the hollow cathode neutralizer. In conclusion, the RF neutralizer has good neutralization ability to neutralizing the ion beams from the ion source to meet the requirements of optics figuring, the RF neutralizer has the potential in optics figuring.