| 基于背散射电子的电子束加工过程在线观测系统研制 |
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| 引用本文： | 张红玉,许海鹰,路开通,左从进.基于背散射电子的电子束加工过程在线观测系统研制[J].航空制造技术,2021(3). |
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| 作者姓名： | 张红玉 许海鹰 路开通 左从进 |
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| 作者单位： | 中国航空制造技术研究院高能束流发生器实验室;南京理工大学材料科学与工程学院 |
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| 基金项目： | 广东省重点领域研发计划项目(2018B090904004);国家自然科学基金(51775527)。 |
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| 摘 要： | 为了在高真空、高温、高金属蒸气的电子束加工过程中获得清晰的观测效果,采用四极板背散射电子接收传感器、高频信号放大电路、高频数据采集卡、高频偏转扫描系统等,研制了一套基于背散射电子的在线观测系统。通过试验验证,所研制系统可以有效观测100mm×100mm范围内的工件,图像分辨率为512像素×512像素,图像处理帧数可以达到6帧/s。
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| 关 键 词： | 电子束 背散射电子 在线观测 高频偏转扫描 图像处理 |
Development of Online View System Based on Backscattered Electrons for Electron Beam Processing |
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| ZHANG Hongyu,XU Haiying,LU Kaitong,ZUO Congjin.Development of Online View System Based on Backscattered Electrons for Electron Beam Processing[J].Aeronautical Manufacturing Technology,2021(3). |
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| Authors: | ZHANG Hongyu XU Haiying LU Kaitong ZUO Congjin |
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| Institution: | (High Energy Beam Generator Laboratory,AVIC Manufacturing Technology Institute,Beijing 100024,China;School of Materials Science and Engineering,Nanjing University of Science and Technology,Nanjing 210094,China) |
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| Abstract: | In order to obtain a clear view of electron beam processing,an online view system was developed based on backscattered electrons with four-plate backscattered electron sensor,high-frequency signal amplification circuit,highfrequency data acquisition card,and high-frequency deflection and scanning system.The experiments indicate that the system can effectively observe the workpiece in the area of 100mm×100mm,the resolution is 512 pixels×512 pixels,and the frames of image processing can reach 6 frames/second. |
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| Keywords: | Electron beam Backscattered electrons Online view High-frequency deflection and scanning Image processing |
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