小束斑电子束脉冲轰击偏压电源的研制

为了获得一种性价比较高的电子束表面处理技术,采用定频调压电路,研制出一种新型偏压脉冲电源。这种电源由偏压主电路拓扑、偏压变压器和偏压整流滤波电路组成,其中偏压主电路由偏压基值发生电路和偏压脉冲发生电路组成。偏压基值发生电路控制偏压脉冲基值,偏压脉冲发生电路控制偏压脉冲频率和占空比。脉冲偏压电源的脉冲基值、脉冲频率、占空比均连续可调,相应实现脉冲束流的幅值、束流频率和占空比的调节。检测分析了脉冲偏压电源的输出电压波形,带载时的输出束流波形,并观察分析了电子束轰击后钨合金组织变化规律。结果表明所研制的脉冲偏压电源输出电压稳定、可调性好,能满足小束斑脉冲电子束轰击工艺的要求。

Design of Small Beam Spot Electron Beam Pulse Bias Power Supply

In order to obtain a cost-effective electron beam surface treatment technology,using a constant frequency voltage regulator circuit,we developed a new type of bias pulse power supply.The power supply was composed of a bias main circuit topology,a bias voltage transformer and a bias rectification filter circuit,where the bias main circuit was composed of a bias base value generating circuit and a bias voltage generating circuit.The bias value generating circuit controls the bias voltage pulse base value,and the bias pulse generation circuit controls the bias pulse frequency and the duty ratio.The pulse base value,pulse frequency and duty ratio of the pulse bias power supply are continuously adjustable,and the amplitude,beam frequency and duty ratio of the pulse beam are adjusted accordingly.The waveforms of the output voltage of the pulsed bias power supply and the output waveform of the pulsed bias power supply are stable and tunable,which can meet the requirements of small beam spot pulse electron beam bombardment process.