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等离子体辅助电子束物理气相沉积制备热防护涂层
引用本文:彭徽,郭洪波,宫声凯,徐惠彬.等离子体辅助电子束物理气相沉积制备热防护涂层[J].航空制造技术,2016(21):98-104.
作者姓名:彭徽  郭洪波  宫声凯  徐惠彬
作者单位:北京航空航天大学材料科学与工程学院,北京,100191
摘    要:电子束物理气相沉积(Electrom Beam-Physical Vapor Deposition,EB-PVD)是制备航空发动机热防护涂层的一种重要技术手段。采用等离子体辅助技术可进一步实现EB-PVD涂层的结构改性和性能提升。对等离子体辅助EB-PVD技术的研究现状进行了简要综述,并对等离子体辅助EB-PVD制备航空发动机MCrAlY抗氧化涂层、氮化物抗冲蚀涂层及YSZ热障涂层研究进行了介绍。

关 键 词:电子束物理气相沉积  等离子体  防护涂层  抗氧化  抗冲蚀  热障涂层

Thermal Protective Coatings Fabricated by Plasma Assisted Electron Beam-Physical Vapor Deposition
Abstract:Electron beam-physical vapor deposition (EB-PVD) is widely utilized for depositing thermal protective coatings onto hot sections in aeroengines. The microstructure and service performance of the EB-PVD coatings can fur-ther be enhanced by introducing plasma activation. In this paper, the state-of-art of plasma assisted EB-PVD was brielfy presented. Then the fabrication and evaluation of the coatings, including the anti-oxidation MCrAlY coating, anti-erosion nitride coating and YSZ thermal barrier coating, were introduced.
Keywords:Electron beam-physical vapor deposition  Plasma  Protective coating  Anti-oxidation  Anti-erosion  Thermal barrier coating
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