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三维随机振动环境下MEMS加速度计输出特性分析
引用本文:孙丽艳,张帅,李鹏,张宏彬,陈东海.三维随机振动环境下MEMS加速度计输出特性分析[J].导航与控制,2017,16(5):58-62.
作者姓名:孙丽艳  张帅  李鹏  张宏彬  陈东海
作者单位:北京航天控制仪器研究所,北京,100039
摘    要:对MEMS惯性测量单元进行了三维随机振动试验,初步探讨了MEMS惯性测量单元在三维振动试验条件下的故障模式:3个轴的MEMS加速度计均出现了零位偏移,该现象在单轴振动试验环境中并没有出现.从理论和仿真分析了该现象产生的机理,提出了解决办法并通过了试验验证.结果表明:三维振动比单轴的振动更能接近真实的振动环境,结构被激发的模态更丰富.通过采取措施,减小了加速度计的零偏值,从9.4m/s2降至1.97m/s2.

关 键 词:三维随机振动  加速度计零位偏移  结构模态

Performance of MEMS Accelerometer in Three-axis Random Vibration Environment
SUN Li-yan,ZHANG Shuai,LI Peng,ZHANG Hong-bin and CHEN Dong-hai.Performance of MEMS Accelerometer in Three-axis Random Vibration Environment[J].Navigation and Control,2017,16(5):58-62.
Authors:SUN Li-yan  ZHANG Shuai  LI Peng  ZHANG Hong-bin and CHEN Dong-hai
Institution:Beijing Institute of Aerospace Control Devices,Beijing 100039,Beijing Institute of Aerospace Control Devices,Beijing 100039,Beijing Institute of Aerospace Control Devices,Beijing 100039,Beijing Institute of Aerospace Control Devices,Beijing 100039 and Beijing Institute of Aerospace Control Devices,Beijing 100039
Abstract:Performance of MEMS inertial measurement unit is tested in three-axis random vibration environ-ment.Failure mode of the IMU in the three-axis random vibration environment is discussed firstly and it didn't occur in the one-axis vibration environment.The cause of the failure is analyzed in theory and simulation.The way to decrease the failure mode is produced and validated by experiment.The result indicates that three-axis vibration environment is more authentic than one-axis,which can excited more modes of the structure.Zero bias of MEMS accelerometer is reduced after our meas-ure: 9.4m/s2to 1.97m/s2.
Keywords:three-axis random vibration  drift of the accelerometer  structure mode
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