基于厚片光胶法的石英挠性加速度计摆片光学冷加工

本文介绍了一种基于厚片光胶的高精度石英挠性加速度计摆片光学冷加工制备方法。现有的主流加工方法一般采用厚度为1.1mm的薄片进行后续加工。在单面环抛机结合光胶工艺的加工方法中，这种厚度的原料片使得成品石英光片在最终下盘时的面型不够理想， 从而影响装配成表的精度。基于此，本文提出了厚片光胶法，运用片厚1.8mm的光片进行后续加工，并在加工过程中增加了一次释放应力加抛光片修饰面型的工序，较好地改善了成品光片的面型。改进工艺后制备所得的光片下盘后光圈数从改进工艺前的2~3个减少为小于1个。作为高精度石英加速度计的关键零部件，改善面型后的光片更好地满足了成表的精度要求。

An Optical Cold Fabrication of Quartz Accelerometer Pendulous Reed Based on Optical Cement with Thick Sheet

This paper describes an optical cold fabrication of quartz accelerometer pendulous reed based on optical cement with thick sheet. The traditional fabrication uses quartz sheets with thicknesses of 1.1mm. This will lead to worse surface figures when the sheets are finished which fabricated by single-side loop polishing machine with optical cement, and will affect the precision of accelerometers finally. Fabrication of optical cement with thick sheets uses sheets with thicknesses of 1.8mm, and adds a step of releasing processing stress and polishing sheets in order to modify the surface figures. As the key parts of high precision accelerometer, the quartz sheet fabricated with new method has less diffraction fringes than with traditional method, which reduces from 2~3 to less than one, and means much better surface figures of finished quartz sheets to meet the precision request of accelerometer.