基于PSD的并联微定位平台位姿检测方法

位置姿态（以下简称位姿）检测是研究六自由度定位平台的技术难点之一，为了快速准确测量六自由度并联微定位平台的位姿，验证平台的定位精度，基于多片二维PSD光电位置传感器设计了六自由度光学位姿检测系统。依据几何光学理论，建立了六自由度位姿解算的数学模型。通过仿真计算，该算法可以快速准确解算六自由度定位平台位姿。进一步分析了该模型在考虑存在测量误差时的理论计算误差，结果表明，基于二维PSD位置传感器的六自由度光学位姿检测系统在解算六自由度定位平台位姿的同时，具备较高的测量精度。

Method of Position and Attitude Detection of Parallel Micro Positioning Platform Based on PSD

The detection of position and attitude is one of the most difficult points when studying 6-DOF positioning platform. In order to measure the position and attitude of 6-DOF parallel micro positioning platform quickly and accurately and to verity the positioning accuracy, this paper designs an optical position and attitude detection system based on pieces of two-dimensional photoelectric position sensor by PSD. The mathematical model of 6-DOF gesture calculation was established based on the theory of geometrical optics. The result indicates that the algorithm is able to calculate the position and attitude of 6-DOF positioning platform quickly and precisely by numerical simulation. The theoretical error of the model which considering the measurement error was presented and analyzed further by numerical simulation. The experimental result indicates that 6-DOF optical position and attitude detection system based on two-dimensional photoelectric position sensor by PSD is able to calculate the position and attitude of 6-DOF positioning platform quickly and precisely, simultaneously can achieve high accuracy of measurement.