基于模态局部化效应的微机械加速度计研究进展

模态局部化效应是安德森局部化在结构动力学中的一种具体表现形式，其利用振动模态的能量局部集中效应实现了灵敏度的大幅度提高。因此，模态局部化效应近年来逐渐被用于研制高精度的谐振式传感器。介绍了模态局部化效应的基本原理及发展历程，及其在各类谐振式传感器中的应用及研究现状，包括质量传感器、电荷传感器、位移传感器以及刚度传感器。最后,着重介绍了模态局部化效应在惯性敏感器件加速度计中的应用及研究现状。

Research Progress of A Novel MEMS Accelerometer Based on Mode Localization

Modal localization is a concrete expression of Anderson localization in structural dynamics. The sensitivity is improved greatly due to the localization of energy in the vibration mode, which also pushes the mode localization to be applied in high-sensitivity resonant sensors in recent years. This paper briefly introduces the principle and development history of mode-localized sensing and the applications in various resonant sensors such as mass sensors, charge sensors, displacement sensors and stiffness sensors. Finally, the applications of mode localization in accelerometer are introduced.