微型化半球陀螺制备工艺发展现状及趋势分析

因低噪声、高性能、无磨损的优势，半球陀螺已成为航空、航天领域内的最佳导航陀螺。半球陀螺的微型化是微机电陀螺领域的研究热点，全球各研究单位设计了多种形态的谐振器结构，开发了各具特色的加工工艺，其选用的材质也各不相同，并研制出了形态各异的微半球陀螺结构。对半球陀螺微型化的历程和方式进行了综述，着重对微型化半球陀螺壳体谐振器的结构形态、工艺制备方法和选材进行了对比和分析，并对各微型化途径的特点进行了讨论和展望。

Development Status and Trend Analysis of Microscale Hemispherical Gyroscope Fabrication Technologies

Hemispherical gyroscope is the best navigation gyroscope in aerospace field because of its low noise, high performance and no wear-out. The microscale hemispherical gyroscope is a research hotspot in the field of micro electro mechanical gyroscope. Various types of resonator structures have been designed by various research institutes in the world, and different fabrication technologies have been developed. Different materials have been selected and different types of microscale hemispherical gyroscope structures have been developed. In this paper, the process and mode of microscale hemispherical gyroscope are reviewed. The structure, process preparation method and material selection of microscale hemispherical gyroscope shell resonators are compared and analyzed. The characteristics of each microscale approach are discussed and prospected.