一种新型的硅片转子调谐陀螺仪

本文介绍一种硅薄片转子调谐式陀螺仪。该陀螺仪继承了动力调谐陀螺仪的结构形式和工作原理，利用微电机驱动陀螺转子，利用两对扭杆和平衡环实现动力调谐，其扭杆、平衡环、陀螺转子和信号器、力矩器均由微机械工艺加工，转子偏角采用差动电容检测，力平衡反馈通过静电力实现。论文详细介绍了该陀螺仪的结构，分析了调谐条件和信号器、力矩器标度因数，讨论了信号检测与力反馈回路的组成与原理。硅薄片转子调谐陀螺仪的体积和质量略大于硅微机械陀螺仪，精度与动力调谐陀螺仪相近（理论可达0.01°/h或更高），且环境适应性较好，成本低，适于要求较高精度和小体积的应用场合。

A Novel Silicon Rotor Turned Gyroscope

This paper introduces a novel thin silicon rotor turned gyroscope(SRTG). With a micro motor driving the rotor and two pairs of torsion bars and a gimbal ring realizing dynamical tuning, this gyroscope inherits the structure and working principle of the dynamically tuned gyroscope(DTG), The torsion bars, gimbal ring, rotor ,annunciator and torquer are processed by micro-mechanical technology. The declination of rotor is sensed by differential capacitances. The rotor is rebalanced by electrostatic forces. In this paper, the details about the structure of SRTG is presented, the conditions for dynamical tuning and the scale factors of the annunciator and torquer are analyzed and the scheme of the rebalance loop is discussed. The size and weight of SRTG are slightly larger than those of the silicon micro-machined gyroscope(SMG), and its precision is close to that of DTG (superior to 0.01°/h in theory ). With better environment adaptability and lower cost, SRTG fits for applications where higher precision and smaller size are necessary.