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| 单晶硅超精密切削加工表面粗糙度预测模型的建立及试验研究 | |
| 引用本文： | 祁华,王艳玲,刘中海.单晶硅超精密切削加工表面粗糙度预测模型的建立及试验研究[J].沈阳航空工业学院学报,2009,26(3):29-32,39. |
| 作者姓名： | 祁华 王艳玲 刘中海 |
| 作者单位： | 1. 沈阳飞机工业集团有限公司,辽宁,沈阳,110034 2. 沈阳市特种设备检测研究院,辽宁,沈阳,110035 3. 沈阳航空工业学院航空制造工艺数字化国防重点学科实验室,辽宁,沈阳,110136 |
| 摘 要： | 利用超精密机床进行切削加工时,对于操作者来说,首先面临的问题是最优切削用量组合的确定,这也是最让操作者感到棘手的问题.单晶硅成功的切削过程取决于优化工艺参数,比如进给量、背吃刀量、切削速度等.为了建立精确可靠的表面粗糙度预测模型,本文将遗传基因算法应用于回归分析,同时在超精密机床上对该预测模型进行了试验验证. |
| 关 键 词： | 单晶硅 超精切削加工 预测模型 |
Study on establishing and testing for ultra-precision machining single crystal silicon surface roughness of prediction model |
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| QI Hua,WANG Yan-ling,LIU Zhong-hai.Study on establishing and testing for ultra-precision machining single crystal silicon surface roughness of prediction model[J].Journal of Shenyang Institute of Aeronautical Engineering,2009,26(3):29-32,39. | |
| Authors: | QI Hua WANG Yan-ling LIU Zhong-hai |
| Institution: | 1.Shenyang Aircraft Corportion;Liaoning Shenyang 110034;2.Shenyang Institute of Special Equipment Inspection and Research;Liaoning Shenyang 110035;3.Shenyang Institute of Aeronautical Engineering Aeronautical Manufacturing Process Digitization Keylab of Fundamental Science for National Defence;Liaoning Shenyang 110136 |
| Abstract: | When using of ultra-precision machine tools,the operators must determine the best combination of cutting parameters firstly.And it is umch so difficult for the operators.Cutting processes of single crystal silicon success depends on the optimization of process parameters,such as feed,cutting parameters,cutting speed and so on.In order to establish accurate and reliable prediction modeles of surface roughness,this article applies to regression analysis,genetic algorithm,at the same time the prediction model ... |
| Keywords: | single crystal silicon ultra-precision machining prediction model |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |