窄频差硅基环形陀螺检测闭环控制系统设计

针对窄频差硅基环形波动陀螺动态性能差的问题，提出了一种基于比例积分微分-惯性环节（proportion integral differential-inertial element，PID-IE）的串联式相位校正检测闭环系统控制器。以硅微机械陀螺仪结构运动方程为基础建立了理想的窄频差U 形弹性梁硅基环形波动陀螺仪的系统模型。通过对环形陀螺开环工作状态下的系统模型及其外围电路的传递函数和波特图分析，设计了一种基于PID-IE的检测闭环系统控制器。通过对其系统模型及外围电路时域仿真，验证了该检测闭环控制系统的可行性，通过仿真发现，加入该控制器后的陀螺输出稳定时间减少了50%，陀螺检测位移输出减小了2个数量级，基本实现了该陀螺的检测位移抑制。在模拟电路中实现了该检测闭环控制系统后，通过实验测试了陀螺检测闭环控制前后的各项性能指标。通过实验测试发现，实现闭环控制后，陀螺输出稳定时间约为0.15 s，陀螺检测位移在闭环工作状态下比开环工作状态减小了97%，陀螺的标度因数比检测开环提高了10倍,零偏及零偏不稳定性与检测开环相比分别提升了3倍和8倍，且闭环控制系统的工作带宽比开环工作带宽提高了30倍。

Design of closed-loop control system for detection of narrow-frequency difference silicon-based ring gyro

Aiming at the problem of poor dynamic performance of narrow frequency difference silicon-based ring wave gyroscope, a series phase correction detection closed-loop system controller based on proportion integral differential-inertial element (PID-IE) is proposed. Based on the structural motion equation of silicon micromachined gyroscope, an ideal system model of narrow frequency difference U-shaped elastic beam silicon-based ring wave gyroscope is established. Through the analysis of the transfer function and bode diagram of the system model and its peripheral circuit under the open-loop working state of the ring gyroscope, a detection closed-loop system controller based on PID-IE is designed. The feasibility of the detection closed-loop control system is verified by the time domain simulation of its system model and peripheral circuit. After the simulation of the closed-loop detection system, it is found that the gyro output stabilization time is reduced by 50 % and the gyro detection displacement output is reduced by 2 orders of magnitude after adding the controller. The detection displacement suppression of the gyroscope is basically realized. After realizing the detection closed-loop control system in the analog circuit, the performance indexes of the gyroscope before and after the detection closed-loop control are tested by experiments. Through experimental tests, it is found that after the closed-loop control is realized, the gyro output stabilization time is about 0.15 s. The detection displacement of the gyroscope in the closed-loop working state is reduced by 97 % compared with the open-loop working state. The scale factor of the gyro is 10 times higher than that of the detection open-loop. The bias and bias instability of the gyro are increased by 3 times and 8 times respectively compared with the detection open-loop, and the working bandwidth of the closed-loop control system is 30 times higher than that of the open-loop working bandwidth.