MEMS梳齿音叉陀螺零偏漂移特性研究

由于MEMS（微机电系统）音叉陀螺多用于车载及无人机导航等应用场合，而外界温度环境因素对其零偏性能有着很大的影响，因此其零偏漂移的大小直接影响着最终导航的性能。本文研究了全温范围传感器漂移特性，旨在提升陀螺零偏稳定性。通过改进电路设计以及采用实时补偿算法对其全温范围零偏漂移进行补偿，将零偏稳定性提升了一个数量级。

MEMS comb tuning fork gyro bias characteristics

As External temperature and environmental factors have a great impact on MEMS (micro-electromechanical system) tuning fork gyro bias performance, which is mostly used for automotive and UAV navigation applications, so its bias stability directly affect the final navigation Performance. This paper studies the drift characteristics of the sensor at full temperature range. Last, the bias stability is improved by an order of magnitude by improving the circuit design and using the real-time compensation algorithm.