硅微陀螺仪的一种新型闭环驱动方案

介绍了一种新的硅微陀螺仪闭环驱动方案.该方案采用推挽驱动方式,即在陀螺仪活动梳齿两边的驱动电极上分别施加同相交流电压和反相直流电压.对驱动性能进行了分析,结果表明驱动力矩的频段与噪声信号频段是分离的.在此基础上,利用锁相技术满足正弦自激振荡的相角和增益条件,建立环路的自激振荡,实现了闭环控制.同时在闭环回路中利用正弦自激振荡的相角条件和锁相环的鉴相特性,消除了驱动信号对驱动检测信号的同频干扰,抑制了环路中的噪声干扰.试验结果显示,驱动电压的频率和幅度的变化量均在0.02%以下,实现了驱动稳幅稳频的目的,陀螺仪精度和可靠性得到了显著提高.

NEW CLOSED-LOOP DRIVING CIRCUIT OF SILICON MICROMACHINED VIBRATORY GYROSCOPE

A new closed-loop driving scheme for the silicon micromachined vibratory gyroscope (SMVG) is proposed. The push-pull driving is adopted and in-phase AC and reverse-phase DC voltages are applied in the driving electrodes placed in both sides of the active combs, respectively. Driving performance analyses show that the frequency spectrum between driving moments and noise signals is separated. Therefore, the model of the closed-loop control is set up with the phase lock loop (PLL). The requirements for phases and gains of the sinusoidal self-drive-oscillation are met by PLL, thus the closed-loop circuit reaches the self-drive-oscillation. Phase conditions of the sinusoidal self-drive-oscillation and the characteristic of phase discrimination of the PLL are used to eliminate the coupling between driving and sense signals, and noise signals. Finally, experimental results show that the variations of both the driving frequency and the amplitude are all under 0.02%. The precision and the reliability of the gyroscope are greatly improved.