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H+辐照前后C-SiC涂层的XPS分析
引用本文:熊器,杨斌,刘耀光,汪德志,黄宁康,雷家荣.H+辐照前后C-SiC涂层的XPS分析[J].南昌航空工业学院学报,2002,16(3):33-37.
作者姓名:熊器  杨斌  刘耀光  汪德志  黄宁康  雷家荣
作者单位:南昌航空工业学院教务处(熊器),四川大学原子核科学技术研究所·教育部辐射物理及技术重点实验室(杨斌,汪德志,黄宁康),中国工程物理研究院核物理与化学所(刘耀光),中国工程物理研究(雷家荣)
基金项目:获国家自然科学基金 (5 97810 0 2 ),中国工程物理研究院科研基金资助
摘    要:对不锈钢基体上离子束混合沉积的C-SiC涂层进行了H^ 辐照模拟试验,由SIMS测量H^ 辐照前后氢的浓试分布,采用沟电子能谱(XPS)对H^ 辐照前后涂层元素C和Si进行了内层电子结合能的测量分析,研究C及Si的化学键态的变化与H的关系,探讨SiC涂层阻氢机理。

关 键 词:涂层  XPS  沟电子能谱    碳化硅  薄膜  阻氢性能
文章编号:1001-4926(2002)03-0033-05
修稿时间:2002年4月27日

XPS analysis for the C-SiC coatings before and after H+ ion irradiation
XIONG Qi ,YANG Bin ,LIU Yao guang ,WANG De-zhi ,HUANG Ning kang LEI Jia rong.XPS analysis for the C-SiC coatings before and after H+ ion irradiation[J].Journal of Nanchang Institute of Aeronautical Technology(Natural Science Edition),2002,16(3):33-37.
Authors:XIONG Qi  YANG Bin  LIU Yao guang  WANG De-zhi  HUANG Ning kang LEI Jia rong
Institution:XIONG Qi 1,YANG Bin 2,LIU Yao guang 3,WANG De-zhi 2,HUANG Ning kang 2 LEI Jia rong 3
Abstract:Simulating experiments of H + irradiation were made for the C-SiC coatings deposited by ion beam mixing on stainless steel substrates. Hydrogen depth profiles of SIMS spectra were measured for the specimen before and after H + ion irradiation. XPS was used to analyze the chemical bonding energy for C and Si elements of coatings before and after H + ion irradation. Relationship between the changes of the chemical bond states for the elements of the C-SiC films and hydrogen was studied. Related mechanism of hydrogen resistant property for the C-SiC coatings was discussed.
Keywords:C-SiC coating  H  + ion irradiation  XPS
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