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原子层热电堆热流传感器研制及其性能测试
引用本文:杨凯,朱涛,王雄,陶伯万,朱新新,王辉,杨庆涛.原子层热电堆热流传感器研制及其性能测试[J].实验流体力学,2020,34(6):86-91.
作者姓名:杨凯  朱涛  王雄  陶伯万  朱新新  王辉  杨庆涛
作者单位:1.中国空气动力研究与发展中心 超高速空气动力研究所, 四川 绵阳 621000
基金项目:国家自然科学基金;国家重点研发计划
摘    要:针对高超声速风洞试验中对高频热流脉动的测试需求,研制了一种基于横向热电效应的原子层热电堆(Atomic Layer Thermopile,ALTP)热流传感器。利用弧光灯热流传感器标定系统对其进行静态标定,获得ALTP热流传感器的灵敏度系数约为8.24 μV/(kW·m-2),优于国外同尺寸敏感元件的ALTP热流传感器6.90 μV/(kW·m-2)的灵敏度系数;利用激波风洞试验,并通过与薄膜热电阻热流传感器对比,初步获得ALTP热流传感器的响应时间上限,响应时间小于0.20 μs。

关 键 词:原子层热电堆    热流传感器    标定    灵敏度系数    响应时间    激波风洞    横向塞贝克效应
收稿时间:2019-10-07

Self-innovated ALTP heat-flux sensor and its performance tests
Institution:1.Hypervelocity Aerodynamics Institute of China Aerodynamics Research and Development Center, Mianyang Sichuan 621000, China2.State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of Electronic, Chengdu 610054, China
Abstract:The transverse Seebeck effect is used to develop the ALTP heat-flux sensor for the high-frequency-pulse heat flux density measurement in hypervelocity wind tunnel tests. The self-innovated ALTP heat-flux sensor is statically calibrated with the xeon short arc lamp calibration system. And the sensitive coefficient is about 8.24 μV/(kW·m-2), which is larger than the sensitive coefficient 6.90 μV/(kW·m-2) of the ALTP heat-flux sensor developed abroad. Then an experiment was conducted in a shock wind tunnel to get the sensor's response time in comparison with thin-film-resistance heat-flux sensors, and the response time of the ALTP heat-flux sensor is less than 0.20 μs.
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