音叉振动电容式表面电位测量装置设计

文章针对振动电容式表面电位测量传感器核心组件——振动音叉进行详细设计，分析得出适用于电位检测的音叉振动形式，确定出音叉结构参数及驱动方式；进行基于传递函数的传感器灵敏度及精度影响因素分析；提出基于电荷感应与静电场仿真的电位测量装置设计方法，得到的传感器灵敏度与理论计算结果一致，并最终通过样机标定实验验证了传感器设计的正确性。

Design of capacitive surface potential measuring device by using tuning fork vibration

The vibration tuning fork is designed to be the core component of the vibration capacitance surface potential detection sensor. The vibration form of the tuning fork relevant with the potential detection is analyzed, and the structural parameters and the driving mode of the tuning fork are determined; The factors influencing the sensitivity and the accuracy of the sensor are analyzed based on the transfer function; A method is proposed for designing the potential measurement device based on the charge induction and the electrostatic field simulation. The sensitivity of the sensor is consistent with the theoretical calculation results. Finally, the sensor design is verified by the prototype calibration experiment.