满足电子枪电场与电子束参数优化的极板个数确定

为保证透射电子显微镜的电子枪输出电子束符合要求,研究极板个数对电子枪电场与电子束的影响.通过计算机建模和仿真分析,探究不同极板个数(N)下的电子加速效果、电场强度及电子束质量.结果表明,在N=6时,电场强度平均值高、均匀度好,电子在相同加速电压作用下具有最高速度,电子束聚焦性能较好.极板个数最佳值的确定,可为电子枪的具...

Determination of the number of acceleration plates for optimal electric field and the electron beam parameters of electron gun

In order to obtain the desirable output electron beam from the electron gun of transmission electron microscope, the effect of the number of plates(N) on the electron beam is studied. Through the computer modeling and the simulation analysis, the electron acceleration effect, the intensity of the electric field, and the quality of the electron beam are evaluated for different plate numbers. It is shown that the average electric field is uniform with high intensity when N=6, the electrons have the highest speed under the same acceleration voltage, and the focusing performance of the electron beam is good. The determination of the optimal number of plates can provide a reference and a basis for the specific structure design of other electron guns.