| 超高真空设备的放气分析 |
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| 引用本文： | 汪 力,闫荣鑫,孙立臣,等.超高真空设备的放气分析[J].航天器环境工程,2009,26(2):158-161. |
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| 作者姓名： | 汪 力 闫荣鑫 孙立臣 等 |
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| 作者单位： | 北京卫星环境工程研究所,北京,100094 |
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| 摘 要： | 文章介绍了超高真空设备放气的理论,并给出两种放气模型:schram吸附模型和吸附-扩散模型;对设备的放气理论值进行了计算,并通过四极质谱仪得出的残余气体质谱图分析出材料放气的成分.
abstract：
this paper discusses the outgassing theory and two outgassing models of materials,that is,schram adsorption model and the adsorption-diffusion model based on malev's theory.the values of outgassing are calculated and outgassing of materials is analyzed by the residual gas spectrum obtained from quadmpole mass spectrometer(qms).
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| 关 键 词： | 放气 超高真空 材料 |
| 收稿时间： | 2008/9/19 0:00:00 |
| 修稿时间： | 2008/9/24 0:00:00 |
Outgassing analysis of ultra-high vacuum facility |
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| Wang Li,Yan Rongxin,Sun Lichen and et al.Outgassing analysis of ultra-high vacuum facility[J].Spacecraft Environment Engineering,2009,26(2):158-161. |
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| Authors: | Wang Li Yan Rongxin Sun Lichen and |
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| Institution: | Beijing Institute of Spacecraft Environment Engineering;Beijing 100094;China |
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| Abstract: | This paper discusses the outgassing theory and two outgassing models of materials,that is,Schram adsorption model and the adsorption-diffusion model based on Malev's theory.The values of outgassing are calculated and outgassing of materials is analyzed by the residual gas spectrum obtained from quadmpole mass spectrometer(QMS). |
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| Keywords: | outgassing ulwa-high vacuum material |
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