电容式硅微机械加速度计系统的特性研究

微硅电容式加速度计是目前微硅加速度传感器发展的主流,影响其性能有多方面的因素。现详细分析了电容式微加速度计敏感模态的工作原理,阐述了不同情况下提高加速度计静态灵敏度所应采取的措施,给出了加速度计三种振动模态的谐振频率与结构参数之间的关系,通过对加速度计集总模型分析,得到了反映和影响加速度计性能的阻尼、灵敏度、分辨率和吸附电压等关键物理量的具体表达形式。从而可知,加速度计的性能和梁的尺寸,检测质量块质量、极板面积、开孔数目等因素有关。

Analysis of Characteristics on Capacitive Silicon Micro-accelerometer System

Nowadays, capacitive silicon micro-accelerometer is the development mainstream of the silicon micro acceleration transducers. Factors, which affected the accelerometer performance, come from many sides. In this paper, the principles of the sensing modal from the capacitive micro-accelerometer were analyzed in detail. How to improve the micro-accelerometer static sensitivity was also described. Relations between the resonant frequency of the three vibrating modals and the structure parameters had been summarized. Based on the model of the lumped parameters from the accelerometer, expressions of the damping, sensitivity, resolution and the pull-in voltage of the accelerometer were also discussed. These expressions also reflected and affected the performance of the accelerometer. Performance of the accelerometer is connected with the dimension of the beam,the proof mass. the area and number of the perforation of the plate and so on.