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| 压电驱动二维超精密微动工作台定位补偿系统的研究 | |
| 引用本文： | 朱喜林,高鹏,袁哲俊,姚英学.压电驱动二维超精密微动工作台定位补偿系统的研究[J].宇航学报,1998,19(4):28-31. |
| 作者姓名： | 朱喜林 高鹏 袁哲俊 姚英学 |
| 作者单位： | 1. 吉林工业大学机械工程系,长春,130025 2. 北京航空航天大学计算机系,北京,100083 3. 哈尔滨工业大学机械工程系,哈尔滨,150001 |
| 摘 要： | 本文首先介绍了压电驱动二维微动工作台定位补偿系统的结构特点，然后对微动工作台的性能进行了分析，给出了性能实测结果，最后研究了系统在超精密定位补偿方面的应用。 |
| 关 键 词： | 压电驱动 工作台 定位 补偿 |
STUDY ON SYSTEM OF POSITIONING AND COMPENSATING BASED ON PIEZODRIVEN TWO-DIMENSION ULTRAPRECISION MICRO DISPLACEMENT WORKTABLE |
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| Zhu Xilin,Gao Peng,Yuan Zhejun,Yao Yingxue.STUDY ON SYSTEM OF POSITIONING AND COMPENSATING BASED ON PIEZODRIVEN TWO-DIMENSION ULTRAPRECISION MICRO DISPLACEMENT WORKTABLE[J].Journal of Astronautics,1998,19(4):28-31. | |
| Authors: | Zhu Xilin Gao Peng Yuan Zhejun Yao Yingxue |
| Abstract: | The feature of positioning and compensating system based on piezodriven two dimension micro displacement worktable was introduced in this paper firstly,then the performance of precision worktable was analyzed,the experimental results were given,finally the application of system in ultraprecision positioning and compensating was studied. |
| Keywords: | Piezodriven Worktable Positioning Compensating |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ | |