| 微型磁通门传感器研究的现状与未来发展 |
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| 作者姓名： | 张雅茹 兰慕杰 王东红 |
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| 作者单位： | 哈尔滨工业大学电子科学与技术系 哈尔滨100051
(张雅茹，兰慕杰)，哈尔滨工业大学电子科学与技术系 哈尔滨100051(王东红) |
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| 摘 要： | 叙述微型磁通门传感器研究的现状 ,介绍微型磁通门传感器的结构和加工工艺 ,比较不同类型微型磁通门的差异 ,探讨微型磁通门传感器研究的发展方向
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| 关 键 词： | 微型磁通门 传感器 MEMS |
Present and Future of Micro-Fluxgate Sensors Development |
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| Authors: | Zhang Yaru Lan Mujie Wang Donghong |
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| Institution: | Zhang Yaru Lan Mujie Wang Donghong |
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| Abstract: | The present status of micro fluxgate sensors are recounted at first in this paper.Then,the structures and processing technology of micro fluxgate sensors are introduced.The differences between dissimilar kinds of micro fluxgate sensors are compared.At last,the development of micro fluxgate sensors in the future are discussed. |
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| Keywords: | Micro fluxgate Sensor MEMS |
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