| 化学气相沉积/渗透技术综述 |
| |
| 引用本文： | 李崇俊,马伯信,金志浩.化学气相沉积/渗透技术综述[J].固体火箭技术,1999,22(1):54-58. |
| |
| 作者姓名： | 李崇俊 马伯信 金志浩 |
| |
| 作者单位： | 1. 中国航天工业总公司四院四十三所,西安,710025
2. 西安交通大学,西安,710049 |
| |
| 摘 要： | 综述了化学气相沉积技术的最新发展，包括金属有机化合物化学气相沉积，等离子辅助化学气相沉积，激光化学气相沉积；同时介绍了三种用于制备工程材料的快速致密化化学气相渗透技术，包括强迫流动热梯度化学气相渗透，化学液相沉积，感应加热热梯度快速致密化技术。
|
| 关 键 词： | 化学汽相淀积 化学气相渗透 碳碳复合材料 陶瓷基复合材料 |
A Review of Chemical Vapour Deposition/Infiltration Technology |
| |
| LI Chong-jun,MA Bo-xin,JIN Zhi-hao.A Review of Chemical Vapour Deposition/Infiltration Technology[J].Journal of Solid Rocket Technology,1999,22(1):54-58. |
| |
| Authors: | LI Chong-jun MA Bo-xin JIN Zhi-hao |
| |
| Abstract: | The processing of chemical vapour deposition (CVD) and recent development are briefly reviewed , including metallic organic compounds chemical vapour deposition, plasma aided chemical vapour deposition, laser chemical vapour deposition. Meanwhile, 3 rapid densification chemical vapour infiltration technologies for fabrication of engineering materials, such as forced flow thermal gradient chemical vapour infiltration, densifacation by liquid precursor, induction heating thermal gradient rapid densification are presented. |
| |
| Keywords: | chemical vapour deposition chemical vapour infiltration + carbon carbon composite ceramic matrix composite |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
