基于激光传感器的液体静压导轨模态仿真与测试方法研究

在超精密加工设备中,超精密液体静压导轨是其关键部件.影响导轨性能的因素有很多,随着加工精度的不断提高,导轨的动态特性成为了不可忽视的因素之一,导轨模态性能测试的准确性更成为其关键.本文采用某型激光传感器对液体静压导轨进行频谱响应测量,测量精度高,测量准确.

Research on Modal Simulation and Testing Method of Hydrostatic Guideway Based on Laser Sensor

The modal simulation of the hydrostatic guideway of a machine tool was carried out by ANSYS software. The first four modes and natural frequencies of the hydrostatic guideway were obtained. The testing system of the hydrostatic guideway was built with a laser sensor as the testing core. By comparing with the simulation results, it can be seen that the test method of this test system has high precision and accurate measurement, which provides a method for the modal test of hydrostatic guideway.