梁-膜结构微压传感器研制

由四个弹性梁和一个刚性中心膜构成的梁-膜结构，具有平面应力集中效应，与一般的结构相比，这种膜片在受到微压时即产生较大的应力集中，使传感器在测量微压时有较高的灵敏度，它的特别的结构能解决一般结构膜片在很薄时由膜应力和弯曲应力产生的严重的非线性。介绍的这种双面腐蚀形成的梁-膜结构的硅压阻式微压传感器的设计就是采用这种应力集中原理，芯片结构的力学特性分析及样件测试结果表明，这种结构的微压传感器具有较高的灵敏度和较低的非线性，成功地实现了对微小压力的测量。利用有限元仿真计算对用于100Pa压力测量的梁-膜结构硅压力传感器的结构参数进行优化，并对芯片版图设计、制作工艺技术和传感器的特性等问题进行了讨论。

Development of a beam-membrane structure micro-pressure sensor

This micro-pressure sensor has a structure of four plastic beams and one rigid central membrane. Comparing with usual structure, this membrane produces greater stress concen- tration due to the effect of plane stress concentration. Therefore, it makes the sensor to be of higher sensitivity while measuring micro-pressure. Moreover, this special structure helps to decrease much of the severe non-linearity caused by the membrane stress and curve stress while the membrane is very thin in the usual structure. This paper introduces a silicon piezoresistive micro- pressure sensor of a beam-membrane structure formed by double-surface etching. Its design is based on the principle of stress concentration. And the mechanical analysis of chip structure and sample test results demonstrate that this beam-membrane structure sensor has a higher sensitivity and lower non-linearity to successfully accomplish the micro-pressure measurement. Besides, the structure parameters of the beam-membrane silicon sensor used for 100 Pa pressure measurement has been optimized by means of Finite element computational simulation, and the chip layout de- sign, manufacture techniques and the sensor characteristics are also discussed.