| 溅射-电镀微成型制造柔性热膜传感器阵列 |
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| 引用本文： | 马炳和,傅博,李建强,邓进军,董拴成.溅射-电镀微成型制造柔性热膜传感器阵列[J].航空学报,2011,32(11):2147-2152. |
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| 作者姓名： | 马炳和 傅博 李建强 邓进军 董拴成 |
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| 作者单位： | 1. 西北工业大学陕西省微/纳米系统重点实验室,陕西西安,710072
2. 中国空气动力研究与发展中心高速空气动力研究所,四川绵阳,621661 |
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| 基金项目： | 国家自然科学基金(50775188)~~ |
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| 摘 要： | 为了实现流场壁面剪应力等动态定点分布测量,提出了一种新的柔性热膜传感器阵列结构,并介绍了其制作工艺.旋涂并升温固化制备聚酰亚胺柔性薄膜衬底,在衬底上溅射沉积金属镍膜,并用剥离工艺成型热敏电阻元件阵列及其引线区底膜.然后在引线区底膜上电镀沉积铜膜,再剥离成型铜引线.通过电镀可以经济快速地获得较厚的引线铜膜,使得引线电阻远...
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| 关 键 词： | 溅射 电镀 微成型 热膜传感器 柔性 剪应力 |
| 收稿时间： | 2010-12-31; |
Flexible Hot-film Sensor Array Fabricated with Sputtering-electroplating Micromachining |
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| MA Binghe,FU Bo,LI Jianqiang,DENG Jinjun,DONG Shuancheng.Flexible Hot-film Sensor Array Fabricated with Sputtering-electroplating Micromachining[J].Acta Aeronautica et Astronautica Sinica,2011,32(11):2147-2152. |
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| Authors: | MA Binghe FU Bo LI Jianqiang DENG Jinjun DONG Shuancheng |
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| Institution: | MA Binghe1,FU Bo1,LI Jianqiang2,DENG Jinjun1,DONG Shuancheng1 1.Key Laboratory of MEMS/NEMS of Shaanxi Province,Northwestern Polytechnical University,Xi'an 710072,China 2.High Speed Aerodynamics Institute,China Aerodynamics Research & Development Center,Mianyang 621661,China |
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| Abstract: | In order to measure dynamically the local temperature or wall shear stress of a flow,a new structure of flexible hot-film sensor array and its fabrication process are proposed.The thermal sensing material,nickel,is sputtered on a polymide flexible substrate,and then patterns to form both the thermal resistor array and the leads' sublayer,on which copper is electroplated and lift-off patterned to form the metal leads.Electroplating can realize economically higher thickness of the lead film than does sputteri... |
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| Keywords: | sputtering electroplating micromachining hot-film sensor flexibility shear stress |
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