| 利用多普勒原理测量微机电系统中微结构的动态特性 |
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| 引用本文： | 白金鹏,史铁林,刘胜,谢勇君.利用多普勒原理测量微机电系统中微结构的动态特性[J].航空制造技术,2008(17). |
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| 作者姓名： | 白金鹏 史铁林 刘胜 谢勇君 |
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| 作者单位： | 华中科技大学机械科学与工程学院 |
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| 摘 要： | 介绍了将显微扫描激光多普勒测振仪与基础激振法相结合的微结构动态特性的非接触无损测量方法、扫描激光多普勒测振仪的工作原理、设计的基础激振器及其驱动信号.并给出典型微结构--微悬臂梁的测量结果.测量结果与理论计算及有限元仿真结果相符,验证了该方法的有效性.
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| 关 键 词： | 基础激振 动态特性 微结构 扫描 激光多普勒测振仪 |
Dynamic Properties of Microstructures in MEMS Using Doppler Effect |
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| Bai Jinpeng Shi Tielin Liu Sheng et al.Dynamic Properties of Microstructures in MEMS Using Doppler Effect[J].Aeronautical Manufacturing Technology,2008(17). |
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| Authors: | Bai Jinpeng Shi Tielin Liu Sheng |
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| Abstract: | The noncontact and nondestruc-tive measurement method for microstructure dynamic properties,which combines micro scanning laser Doppler vibrometer(SLDV) with the base excitation,the working principle of SLDV,the base exciter and its drive signal are introduced.The testing results of the typical microstructure-micro cantilever beam are given.It consists with the results of the theoretical calculation and FEM which verifies the effectiveness of this method. |
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| Keywords: | Base excitation Dynamic property Microstructure Scanning laser Doppler vibrometer |
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