| Fe-Cr-Al/Si非晶态薄膜的电阻-应力特性 |
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| 引用本文： | 陈秉玉,王连金,程先安.Fe-Cr-Al/Si非晶态薄膜的电阻-应力特性[J].航空学报,1991,12(8):411-416. |
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| 作者姓名： | 陈秉玉 王连金 程先安 |
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| 作者单位： | 北京航空航天大学
(陈秉玉，王连金)，北京航空航天大学(程先安) |
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| 基金项目： | 航空航天工业部科学研究基金 |
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| 摘 要： | 对非晶态Fe-Cr-Al/Si薄膜研究了方块电阻与灵敏度、电阻温度系数、电阻率以及薄膜厚度等的关系;根据升温时薄膜电阻开始剧变推算了薄膜的晶化温度,并评估了Fe-Cr-Al/Si薄膜作为力传感器敏感材料的品质。
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| 关 键 词： | 薄膜 电阻-应力特性 温度系数 |
THE RESISTANCE VERSUS STRESS CHARACTERISTICS OF AMORPHOUS Fe-Cr-AI/Si THIN FILMS |
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| Beijing University of Aeronautics and Astronautics Chen Bingyu,Wang Lianjin and Cheng Xianan.THE RESISTANCE VERSUS STRESS CHARACTERISTICS OF AMORPHOUS Fe-Cr-AI/Si THIN FILMS[J].Acta Aeronautica et Astronautica Sinica,1991,12(8):411-416. |
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| Authors: | Beijing University of Aeronautics and Astronautics Chen Bingyu Wang Lianjin and Cheng Xianan |
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| Institution: | Beijing University of Aeronautics |
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| Abstract: | Displaying a good linearity between the resistance and the stress, the amorphous Fe-Cr-Al/Si thin film is promising to be used as a transducer. Here the dependence of gauge factor, the temperature coefficient of resistance, the resistivity on sheet resistance and the thickness of the films are reported. Heat treatments of the samples are investigated. The crystalization temperature of the films is estimated by the drastic change in resistance during heating. Based on thess experimental results, an evaluation about the usefulness of the films for force transducer is made. |
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| Keywords: | thin film resistivity-strain characteristics temperature coefficient of resistivity |
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