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基于VO_x非致冷探测器的红外地球敏感器探讨
引用本文:刘科,梅志武,涂智军.基于VO_x非致冷探测器的红外地球敏感器探讨[J].空间控制技术与应用,2011,37(3):58-62.
作者姓名:刘科  梅志武  涂智军
作者单位:北京控制工程研究所,北京,100190
摘    要:近年来VOx非致冷红外探测器的研制取得了较快发展,由于在波长14~16μm范围内有较高的响应率,使其应用于红外地球敏感器成为可能.介绍了基于VOx非致冷红外探测器的红外地球敏感器,对主流VOx探测器的MEMS微桥结构和产品性能参数进行比较,并分别讨论了使用面阵器件和线阵器件的红外地球敏感器应用.

关 键 词:VOx  非致冷红外探测器  红外地球敏感器

Discussion on Uncooled VO_x Microbolometer-Based Infrared Earth Sensor
LIU Ke,MEI Zhiwu,TU Zhijun.Discussion on Uncooled VO_x Microbolometer-Based Infrared Earth Sensor[J].Aerospace Contrd and Application,2011,37(3):58-62.
Authors:LIU Ke  MEI Zhiwu  TU Zhijun
Institution:LIU Ke,MEI Zhiwu,TU Zhijun(Beijing Institute of Control Engineering,Beijing 100190,China)
Abstract:Because of high responsivity in the spectra range from 14μm to 16μm,it is possible that the an uncooled VOx microbolometer is applied to static infrared earth sensor.The principle of the cooled VOx microbolometer-based infrared earth sensor is introduced.Several typical VOx microbolometers MEMS structures and performance parameters of are shown.The application of the cooled VOx microbolometer in static infrared earth sensor is discussed.
Keywords:VOx  uncooled microbolometer  earth sensor  
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