| 化学气相沉积法制备纳米铁薄膜的实验研究 |
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| 引用本文： | 刘旭辉,谢巍,宋辉,徐葳,余江龙.化学气相沉积法制备纳米铁薄膜的实验研究[J].沈阳航空工业学院学报,2007,24(4):91-94. |
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| 作者姓名： | 刘旭辉 谢巍 宋辉 徐葳 余江龙 |
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| 作者单位： | 沈阳航空工业学院飞行器动力与能源工程学院,辽宁,沈阳,110034 |
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| 摘 要： | 纳米铁薄膜是近年来国内外纳米材料科学关注的前沿领域之一,在诸多领域有广泛应用。目前大规模低成本制备方法还有待研究。以铁丝为原材料,利用羰基金属的化学特性,采用化学气相沉积法在石英基片上沉积纳米铁薄膜,利用扫描电子显微镜对不同条件下制备的薄膜进行了分析。结果表明采用以纯铁为原始材料,可以在较宽的实验条件下形成不同特点的纳米铁薄膜。
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| 关 键 词： | 化学气相沉积法 纳米铁 纳米薄膜 |
| 文章编号： | 1007-1385（2007）04-0091-04 |
| 收稿时间： | 2007-03-29 |
| 修稿时间： | 2007年3月29日 |
Experimental research for the preparation of iron nano-films by chemical vapor deposition |
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| LIU Xu-hui,XIE Wei,SONG Hui,XU Wei,YU Jiang-long.Experimental research for the preparation of iron nano-films by chemical vapor deposition[J].Journal of Shenyang Institute of Aeronautical Engineering,2007,24(4):91-94. |
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| Authors: | LIU Xu-hui XIE Wei SONG Hui XU Wei YU Jiang-long |
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| Institution: | Aero - engine and Energy Engineering College, Shenyang Institute of Aeronautical Engineering, Liaoning shenyang 110034 |
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| Abstract: | Iron nano-film which of variety of potential application, is one of the frontier fields attracting wide interests of materials science researcher and.Currently,large scale nano-films product research at a low cost is desirable.In this paper,iron nano-films have been synthesized on SiO2 substrates using Chemical Vapor Deposition(CVD) method from pure iron material and CO gas as the starting materials.The samples prepared under different conditions were analyzed by scanning electron microscope(SEM).The results demonstrated that iron nano-films could be formed on the SiO2 substrates using iron as the starting material under a variety of experimental conditions. |
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| Keywords: | chemical vapor deposition(CVD) nano-iron nano-films |
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