| 材料表面两层薄膜硬度的测试计算 |
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| 引用本文： | 王林栋,李敏,梁乃刚.材料表面两层薄膜硬度的测试计算[J].中国航空学报,2003,16(4):212-216. |
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| 作者姓名： | 王林栋 李敏 梁乃刚 |
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| 作者单位： | [1]StateKeyLab.ofNonlinearMechanics,InstituteofMechanics,ChineseAcademyofSciences,Beijing100080,China [2]Dept.ofFlightVehicleDesignandAppliedMechanics,BeijingUniversityofAeronauticsandAstronautics,Beijing100083,China |
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| 基金项目： | Chinese Academy of Sciences Foundation (KGCX1-11)，N ational Natural Science Foundation of China (10 2 3 2 0 5 0 )，Min-istry of Science and Technology Foundation (2 0 0 2 CB412 70 6) |
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| 摘 要： | 给出了基于纳米硬度试验的二层薄膜的硬度测算方法。首先利用有限元方法探讨了二层薄膜一基体材料系统的硬度随压痕深度变化的规律，进而推导和验证了材料系统硬度一位移曲线的拟合公式，最后给出了以压痕实验为基础的二层薄膜材料硬度的计算公式。
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| 关 键 词： | 压痕实验 二层薄膜材料 材料硬度 测试 计算 有限元方法 |
Hardness Measurement and Evaluation of Double-layer Films on Material Surface |
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| WANG Lin-dong,LI Min,LIANG Nai-gang.Hardness Measurement and Evaluation of Double-layer Films on Material Surface[J].Chinese Journal of Aeronautics,2003,16(4):212-216. |
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| Authors: | WANG Lin-dong LI Min LIANG Nai-gang |
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| Abstract: | A method for hardness measurement and evaluation of double-layer thin films on the material surface is proposed. Firstly, it is studied how to obtain the force-indentation response with the finite element method when the indentation is less than 100 nanometers, in which current nanoindentation experiments have no reliable accuracy. The whole hardness-displacement curve and fitted equation are obtained. At last, a formula to predict the hardness of the thin film on the material surface is derived and favorably compared with experiments. |
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| Keywords: | double-layer films hardness nanoindentation finite element simulation |
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