| MEMS环形谐振陀螺闭环系统建模、仿真与参数分析 |
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| 引用本文： | 王浩,叶泽刚,张奇荣,权海洋.MEMS环形谐振陀螺闭环系统建模、仿真与参数分析[J].导航与控制,2017(6):25-32. |
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| 作者姓名： | 王浩 叶泽刚 张奇荣 权海洋 |
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| 作者单位： | 北京微电子技术研究所,北京,100076 |
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| 摘 要： | 针对一款数字可配置的MEMS环形谐振陀螺,对陀螺表头和信号处理电路进行数学建模,推导陀螺检测系统指标参数与机电特性参数之间数学关系,为可配置ASIC电路提供理论支撑.通过对实测表头数据和理论模型数据进行对比分析,验证了模型的有效性与准确性.
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| 关 键 词： | MEMS 环形谐振陀螺 系统建模 数字可配置 |
System Modeling, Simulation and Parameter Analysis of MEMS Vibrating Ring Gyroscope |
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| WANG Hao,YE Ze-gang,ZHANG Qi-rong and QUAN Hai-yang.System Modeling, Simulation and Parameter Analysis of MEMS Vibrating Ring Gyroscope[J].Navigation and Control,2017(6):25-32. |
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| Authors: | WANG Hao YE Ze-gang ZHANG Qi-rong and QUAN Hai-yang |
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| Institution: | Beijing Microelectronics Technology Institute, Beijing 100076,Beijing Microelectronics Technology Institute, Beijing 100076,Beijing Microelectronics Technology Institute, Beijing 100076 and Beijing Microelectronics Technology Institute, Beijing 100076 |
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| Abstract: | There is an MEMS vibrating ring gyroscope based on a digital configuration, its mathematical modeling of gyro head and signal processing circuit is implemented, parameters ' mathematical relationship between gyro detection system and electromechanical characteristic is deducted, it can provide theoretical support for the configurable ASIC circuit . The validity and accuracy of the model are verified by comparing and analyzing the measured head data and theoreti-cal model data. |
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| Keywords: | MEMS vibrating ring gyroscope system modeling digital configuration |
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