| 光学非球面超精密磨削质量控制技术研究 |
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| 引用本文： | 程延江,胡忠辉,马文生,陈斌,张志.光学非球面超精密磨削质量控制技术研究[J].宇航学报,2006,27(12):222-226. |
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| 作者姓名： | 程延江 胡忠辉 马文生 陈斌 张志 |
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| 作者单位： | [1]哈尔滨工业大学,哈尔滨150001 [2]中国科学院长春光学精密机械与物理研究所,长春130033 |
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| 基金项目： | 应用光学国家重点实验室基金（Z03Q10J） |
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| 摘 要： | 对光学非球面超精密磨削技术和表面加工质量控制技术进行了理论分析和实验研究。通过对MSG-325金刚石超精密车床的技术改造，可以对各种光学表面进行超精密磨削加工，尤其适合于光学非球面的超精密加工，在较短时间直接达到光学零件的表面质量要求。采用改造的磨削系统，加工出左端为抛物面，右端为双曲面的微晶玻璃内非球面，加工表面粗糙度Ra3nm。
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| 关 键 词： | 超精密磨削 非球面加工 质量控制 微晶玻璃 |
| 收稿时间： | 07 27 2005 12:00AM |
| 修稿时间： | 10 13 2005 12:00AM |
Research on the Quality Control of Ultra-Precision Grinding of Aspheric Surface |
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| CHENG Yan-jiang , HU Zhong-hui , MA Wen-sheng, CHEN Bin, ZHANG Zhi,.Research on the Quality Control of Ultra-Precision Grinding of Aspheric Surface[J].Journal of Astronautics,2006,27(12):222-226. |
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| Authors: | CHENG Yan-jiang HU Zhong-hui MA Wen-sheng CHEN Bin ZHANG Zhi |
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| Institution: | 1. Harnib Institute of Technology, Harbin 150001, China; 2. Changchun Institute of Optics Fine Mechanics and Physics, Changchun 130033, China |
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| Abstract: | In this paper, the theoretical analysis and grinding experiments are presented on the technology of ultra-precision grinding and quality control of aspheric surface. By using the rebuild CNC ultra-precision grinding system, the results of the ultraprecision grinding of optical aspheric surface can be completed, and the smooth inner-aspheric surface of micro-crystal glass with the roughness of Ra 3 nm is obtained in a shorter time. |
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| Keywords: | Ultra-precision grinding Aspheric machining Quality control Micro-crystal glass |
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