| 微波MEMS滤波器的研究进展 |
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| 作者姓名： | 李文明 李骁骅 杨月寒 刘海文 杨谟华 于奇 |
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| 作者单位： | 电子科技大学电子薄膜与集成器件国家重点实验室;中国科学院光电技术研究所微细加工光学技术国家重点实验室; |
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| 摘 要： | 文章介绍了应用于射频微波系统的MEMS滤波器，结合最近几年国内外的MEMS滤波器研究成果，从MEMS滤波器的设计方法和滤波器性能等方面阐述了各种MEMS滤波器的技术发展状态。
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| 关 键 词： | 微机电系统 微波滤波器 单片微波集成电路 |
Research Progress of RF MEMS Filters |
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| Authors: | Li Wenming Li Xiaohua Yang Yuehan Liu Haiwen Yan Mohua Yu Qi |
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| Institution: | 1.State Key Laboratory of Electronic Thin Films and Integrated Devices/a>;University of Electronic Science and Technology of China/a>;Chengdu 610054/a>;China/a>;2.State Key Lab.of Optical Technologies for Microfabrication/a>;Institute of Optics &.Electronics/a>;Chinese Academy of Sciences/a>;Chengdu 610209/a>;China |
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| Abstract: | In this paper,MEMS microwave filters are classified and described comprehensively.According to recent development of MEMS microwave filters,the state-of-the-art of microwave MEMS filters is presented from the view of design and performance.The significance of MEMS filter technology is proposed. |
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| Keywords: | MEMS Microwave filter MMIC |
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