| 控制力超精密研抛测控系统 |
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| 引用本文： | 史兴宽,仝猛,徐传义.控制力超精密研抛测控系统[J].航空精密制造技术,2000,36(1):13-16. |
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| 作者姓名： | 史兴宽 仝猛 徐传义 |
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| 作者单位： | 西北工业大学精密超精密加工技术研究室,西安 710022 |
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| 摘 要： | 简要介绍超精密抛光技术的发展动态,围绕精密研抛机的现有加工技术水平,开发可实现超精密抛光的控制力系统.
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| 关 键 词： | 控制力 超精密加工 研抛加工 |
| 文章编号： | 1003-5451(2000)01-0013-04 |
| 修稿时间： | 1999年10月25 |
Force-controlled System for Ultra-precision Lapping and Polishing |
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| Shi Xing-kuan,Tong meng,Xu Chuan-yi.Force-controlled System for Ultra-precision Lapping and Polishing[J].Aviation Precision Manufacturing Technology,2000,36(1):13-16. |
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| Authors: | Shi Xing-kuan Tong meng Xu Chuan-yi |
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| Abstract: | In this paper,the developments in ultra-precision polishing technology have been discussed and introduced.Based on the existing machining capability of precision lapping and polishing machinery,the force-controlled system for ultra-precision polishing of optical plate substrate with smooth surface has been developed. |
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| Keywords: | force-controlled ultra-precision machining lapping and polishing |
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