微机械陀螺在线自测试

开发了用于科氏振动陀螺的在线自测试方法.该方法通过一种用于电容传感器的微机械陀螺数字读出电路实现.在微机械结构上施加一些额外的信号,传感器的最终性能(<0.1°/s)不会恶化.自测试的目标是验证科氏振动陀螺的第一和第二模态运动是否正常.对比其他的方法,该方法不会使器件性能退化,且可在运行的任何时间进行测试而不会干扰正常操作.该方法使微机械陀螺的性能得到提高,保证了传感器的正常功能.而在传感器非正常工作时可生成错误信号.

ON-LINE SELF-TESTING FOR MICRO-MACHINED GYROSCOPES

An on-line self-testing for Coriolis vibratory gyroscopes (CVGs) is realized according to a digital readout electronics for capacitive sensors and micro-machined angular rate sensors. By applying some additional signals to the micro-machined structure, the actual noise performance (<0.1 °/s) is not worsened. The running of the primary and the secondary oscillators of CVGs is verified by self-testing. Compared with other methods, the device needs not to check the functionality. In this new approach the on-line testing is conducted at any time without disturbing the normal operational mode. Based on the approach the performance of the micro-machined gyroscope can be improved and a secure availability of the functionality of the micro-machined angular rate sensor is guaranteed. Furthermore, the error signal is generated when the sensor works incorrectly.