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MOCVI制备Nextel 720/SiO2复合材
引用本文:陈照峰,张立同,成来飞,徐永东,肖鹏. MOCVI制备Nextel 720/SiO2复合材[J]. 航空材料学报, 2001, 21(1): 13-17
作者姓名:陈照峰  张立同  成来飞  徐永东  肖鹏
作者单位:西北工业大学
基金项目:航空基金(99G53081)
摘    要:研究了MOCVI(MetalOrganicChemicalVaporInfiltration)方法制备Nextel720/SiO

关 键 词:TEOS;MOCVI;Nextd 720/SiO
文章编号:1005-5053(2001)01-0013-05
修稿时间:2000-08-17

Nextel 720/silica composites by metal organic chemical vapor infiltration
CHEN Zhao-Feng,ZAHNG Li-tong,CHENG Lai-fei,XU Yong-dong,XIAO Peng. Nextel 720/silica composites by metal organic chemical vapor infiltration[J]. Journal of Aeronautical Materials, 2001, 21(1): 13-17
Authors:CHEN Zhao-Feng  ZAHNG Li-tong  CHENG Lai-fei  XU Yong-dong  XIAO Peng
Abstract:The development of non-oxide ceramic matrix composite has resulted in composites with suitable property for certain structural application, but they all retain susceptible to long term degradation after high temperature exposure to oxidizing environments. Continuous oxide fibers reinforced oxide matrix composites are attractive for use as high temperature structural materials because they can combine composite properties with long-term oxidative stability. In this paper, the processing of Nextel 720/silica composites by MOCVI (metal organic chemical vapor infiltration) at atrnosphere pressure is described. TEOS (Tetraethylorthosilicate) was used as precursor. The effects of concentration of O2, flux of carrier,temperature of TEOS and deposition temperature on deposition rate of silica and Nextel 720/silica microstructure were studied with lots of experiments. The results exhibit the optimal conditions for MOCVI are TEOS temperature 60℃, deposition temperature 600℃, flow rates of Ar and O2 400 ml· rnin- 1 and 30 ml· min-1 respectively.
Keywords:TEOS   MOCVI   Nextel 720/silica   composites   processing
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