| 组合坐标法精确测量微纳米台阶样板高度 |
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| 引用本文： | 朱振宇,傅星.组合坐标法精确测量微纳米台阶样板高度[J].航空计测技术,2011(6):23-26. |
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| 作者姓名： | 朱振宇 傅星 |
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| 作者单位： | [1]天津大学精密仪器与光电子工程学院,天津300072 [2]中航工业北京长城计量测试技术研究所,北京100095 |
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| 基金项目： | “十一五”技术基础计量科研项目资助（J052006A101） |
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| 摘 要： | 微/纳米级台阶高度的精确测量是纳米计量技术领域中重要的研究工作。文中提出了一种以精确定位为前提的多区域坐标组合台阶高度测量法,应用纳米三维测量机实现了标称高度1mm的微/纳米级台阶样板高度的精确测量。结合实验数据,对影响测量结果的环节进行了分析,确定了影响测量结果的主要因素,并阐述了相应的解决办法。该技术内容对研究台阶样板的精确测量工作具有一定的技术参考价值和借鉴作用。
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| 关 键 词： | 纳米计量 台阶样板 测量 测量不确定度 |
Measurement of Micro-nano Scale Step Height Specimen Using Combination Coordinate Method |
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| ZHU Zhenyu,FU Xing.Measurement of Micro-nano Scale Step Height Specimen Using Combination Coordinate Method[J].Aviation Metrology & Measurement Technology,2011(6):23-26. |
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| Authors: | ZHU Zhenyu FU Xing |
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| Institution: | 1.College of Precision Instrument and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China; 2.Changcheng Institute of Metrology ＆ Measurement,Beijing 100095,China) |
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| Abstract: | The accurate measurement of micro-nano scale step specimens is an important research in nanometrolgy.This paper presents a more accurate positioning method with regional groupings for step specimen height measurement,and achieves the measurements of micro-nano scale step specimen with nominal height of 1mm using the Nano Coordinate Measurement Machine.Combined with experimental data,the impact aspects of the measurement results were analyzed to determine the main factors affecting the measurement results,and the corresponding solutions were described.The technical content of the research will be helpful for other precise measurements of step specimen. |
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| Keywords: | nanometrology step specimen measurement uncertainty of measurement |
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