一种高陡度光学镜面高精度机械式测量方法

本文建立了高陡度光学镜面的多段拼接测量方法,将高陡度光学镜面轮廓的测量分割为具有一定重叠区域的数段较短面形轮廓的测量.通过测量系统与被测工件之间的相对旋转与平移运动调整被测工件的姿态实现分段轮廓的测量.之后通过拼接算法将各段面形轮廓拼接起来,重构出被测工件的面形误差.在建立了测量数学模型的基础上,介绍了设计的测量实验系统.并进行了相关实验.仿真与测量实验表明:上述方法能够高精度的重构出被测轮廓.

Measurement Method of Profile Matching Reconstruct on Steep Optical Mirror Mechanical Measurement

The measurement method of steep optical mirrors is built with the profile matching technique.A high-gradient multimirror optical metrical method is established.The profile of the steep optics is divided into several sections with some overlap points,and the local profile measurement is performed.After the measurement of a local profile,the measurement instrument moves to the next section with relative movement of rotation and translation.With the local profiles,the global profile is constructed by using profile matching technique.