| 合金薄膜高温压力传感器研究进展 |
| |
| 引用本文： | 李伟,陈怀礼.合金薄膜高温压力传感器研究进展[J].火箭推进,2011,37(5):78-82. |
| |
| 作者姓名： | 李伟 陈怀礼 |
| |
| 作者单位： | 西安航天动力研究所,陕西西安,710100 |
| |
| 摘 要： | 合金薄膜压力传感器克服了粘贴式应变压力传感器的缺点,性能更优良,适应恶劣环境压力测量要求。对合金薄膜压力传感器的工作原理进行了介绍,比较了几种压力传感器的优缺点,并以应用温度范围这一指标为中心论述了镍铬、铂钨及钯铬薄膜压力传感器的性能特点及研究现状。镍铬薄膜传感器适用于中、低温介质压力测量,而铂钨、钯铬薄膜传感器适用于...
|
| 关 键 词： | 压力传感器 高温 合金薄膜 |
Advance in alloy thin-film pressure sensor for high-temperature environment |
| |
| LI Wei,CHEN Huai-li.Advance in alloy thin-film pressure sensor for high-temperature environment[J].Journal of Rocket Propulsion,2011,37(5):78-82. |
| |
| Authors: | LI Wei CHEN Huai-li |
| |
| Institution: | LI Wei,CHEN Huai-li (Xi'an Aerospace Propulsion Institute,Xi'an 710100,China) |
| |
| Abstract: | The alloy thin-film pressure sensor has overcome the shortcomings of stickup pressure sensor,has more excellent performances and is suitble for harsh environments.The working principle of the alloy thin-film pressure senso is introduced in this paper.The advantages and disadvantages of several pressure sensors are compared.Taking the sensor's working temperature as an assessment index,the characteristics and development status of nickel-chromium(NiCr),platinum-tungsten (PtW) and palladium-chromium(PdCr) thi... |
| |
| Keywords: | pressure sensor high temperature alloy thin-film |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
|
