| 微结构谐振传感器 |
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| 引用本文： | 樊尚春,刘广玉.微结构谐振传感器[J].北京航空航天大学学报,1992(2):30-34. |
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| 作者姓名： | 樊尚春 刘广玉 |
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| 作者单位： | 北京航空航天大学自动控制系
(樊尚春)，北京航空航天大学自动控制系(刘广玉) |
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| 摘 要： | 阐述了频率输出的新型谐振传感器的发展方向之一——微型化。评价性地论述了热激励硅谐振压力传感器和热激励谐振膜质量流量传感器。重点讨论了热激励的原理,特点等。指出我国应对传感器的这一发展趋势给予足够的重视。
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| 关 键 词： | 谐振传感器 微结构 热激励 |
MICRORESONATOR SENSORS |
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| Fan Shangchun Liu Guangyu.MICRORESONATOR SENSORS[J].Journal of Beijing University of Aeronautics and Astronautics,1992(2):30-34. |
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| Authors: | Fan Shangchun Liu Guangyu |
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| Institution: | Dept. of Auto. Control |
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| Abstract: | This paper expounds the microminiaturization of new resonator sensor with freqency output,which is one of the developing tendencies.It gives an exposition of the thermally excited silicon resonator pressure sensor and the thermally excited resonating membrane mass flow sensor.Especially,it discusses the operating principle and characteristics for the thermally excited sensors.And it points out this tendency of sensor should be noticed considerable at home. |
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| Keywords: | resonator sensor micro constructive thermally excited pressure sensor mass flow sensor |
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