微机械加速度计发展现状浅析

自微机电系统（MEMS）技术以IC工艺为基础发展以来，微机械加速度计便作为其中一个耀眼的应用实例大放异彩。在国外，上世纪九十年代就有低精度微加速度计产品，同时国内也开始了相关研究。时至今日，微加速度计已经按高精度、中精度、低精度三个精度等级分别发展。以麻省理工大学（MIT）Draper实验室为代表的一些国外机构已经研制出10-7g级别的高精度微加速度计样机并尝试在潜射导弹、洲际导弹再入等方面取得应用，乃至将来替代高精度摆式积分陀螺加速度计（PIGA）；以COLIBRYS、Honeywell等公司为代表的商业机构，依托自身科研能力，致力于将中精度微机械加速度计推出量产化的单表和组合成品并推向低端军用和高端民用市场；以AD、ST等公司为代表的跨国公司，依托自身工艺线，推出大量的微机械加速度计，占领了消费电子市场。国内的研制分工也越来越细化，技术路线、行业分工、研究内容、需求牵引都越来越明确，其中压阻式、热对流式微机械加速度计已经产业化，微机械加速度计已有小批量的产品，硅微谐振式加速度计也显示了很好的发展前景。本文试对发展现状进行了简单评析。

A Probe into Actualities of the Microaccelerometer Development

Since MEMS technologies develop by IC process technologies, micro accelerometer shows its unique vitality as a classical MEMS product case. There is already low performance micro accelerometer products abroad since 1990s, when domestic relative research starts. Nowadays, there are high, middle, low performance grades of instances. Some foreign institutions, such as MIT Draper Lab, have researched out high performance micro accelerometer prototypes of 10-7g, and attemp to utilize the product in military field such as intercontinental ballistic missile and submarine-launched strategic missiles, in order to find an alternative for PIGA. Some foreign companies, such as COLIBRYS, Honeywell, have got swarm of products of middle performance, and entered high level civil markets and low level military markets. Other multinational corporations such as AD, ST, have got legions of products of low performance, which are with mini-size, low power consumption, low cost, and utilization convenience. The corresponding products holds the consumption electronics markets with low cost and huge amounts, supported by their IC/MEMS process lines. The domestic research classification is getting clear, and the technical track, the major classification, the research contents, and the requirement draught are determined. The piezoresistance micro accelerometers and the thermal convection micro accelerometers have also been brought about industrialization, and the capacitive micro accelerometers are volumely manufacturable, SOA also shows an excellent perspective. This Paper trys to get a probe in the recent actualities.