| 沉积含Si过渡层对于不锈钢上沉积的DLC薄膜的性能影响 |
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| 引用本文： | 崔砚,柳文涛,闫春和.沉积含Si过渡层对于不锈钢上沉积的DLC薄膜的性能影响[J].导航与控制,2014(4):56-61. |
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| 作者姓名： | 崔砚 柳文涛 闫春和 |
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| 作者单位： | 北京航天控制仪器研究所;北京航天控制仪器研究所;北京航天控制仪器研究所 |
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| 摘 要： | 本文介绍了采用RF-PECVD法在3Cr13不锈钢基体圆片上沉积制备类金刚石多层膜，其内层薄膜为掺Si的过渡层，外层为不同厚度的在50～1000 nm之间的类金刚石薄膜（DLC）。实验结果表明沉积过渡层可以有效提高薄膜与基体的结合力。类金刚石薄膜的摩擦系数和薄膜在摩擦过程中的损坏情况都与外层薄膜的厚度有关。
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| 关 键 词： | DLC薄膜 RF-PECVD 含Si过渡层 |
Effect of Deposition of Diamond-like Carbon (DLC) Films with Si-doped Transition Layer on 3Cr13 Stainless Steel |
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| CUI Yan,LIU Wen-tao and YAN Chun-he.Effect of Deposition of Diamond-like Carbon (DLC) Films with Si-doped Transition Layer on 3Cr13 Stainless Steel[J].Navigation and Control,2014(4):56-61. |
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| Authors: | CUI Yan LIU Wen-tao and YAN Chun-he |
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| Institution: | Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device;Beijing Institute of Aerospace Control Device |
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| Abstract: | DLC films were deposited on stainless steel substrate using radio frequency plasma enhanced chemical vapor deposit ion (RF-PECVD) was introduced in this paper. Its inner layer was Si-doped transition layer, and its outer layer was DLC film which varied from 50nm to 1000nm.The results showed the transition layer enhanced the cohesion between film and substrate and it can reduce friction coefficient. |
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| Keywords: | DLC film RF-PECVD Si-doped transition layer |
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