| 参数自适应误差自校准的Sigma-Delta闭环微机械陀螺仪 |
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| 作者姓名： | 周景川 熊瑞宏 陈方 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所 传感技术联合国家重点实验室；
中国科学院大学 |
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| 摘 要： | 提出并实现了一种用于MEMS谐振陀螺仪的新型自适应自校准多级噪声整形(MASH) 微机电sigmadelta闭环测控电路方案。该技术针对高精度MEMS音叉陀螺仪的误差校准, 开发了在线自适应误差校准的MASH2-0闭环测控电路,且无需使用任何额外的机械校准方法。该技术不仅可以有效地消除由于MEMS音叉陀螺仪敏感元件加工误差和接口测控电路之间的参数失配在输出端产生的误差影响,并且能够校正由非理想信号传递函数而导致的信号链路传输中的频谱失真和增益失配。试验结果表明,与传统的闭环MEMS陀螺仪相比,所提出的自适应MASH2-0闭环测控电路技术可以实现更好的系统稳定性、动态范围和噪声性能。
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| 关 键 词： | MEMS陀螺仪 自校准 sigma-delta 调制器 MASH 自适应 参数匹配 |
Adaptive On-Line Self-Calibration of Errors in Multi-Stage-Noise-Shaping (Mash) Sigma-Delta Modulator Gyroscope |
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| Authors: | ZHOU Jingchuan XIONG Ruihong CHEN Fang |
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| Abstract: | A novel adaptive self-calibrated multistage-noise-shaping (MASH) electro mechanical sigma-delta modulator sensing scheme for MEMS Coriolis gyroscope is introduced in this paper. The proposed system adopts an online adaptive MASH2-0 modulator for a MEMS tuning-fork gyroscope without using any additional mechanical calibration methods. The quantization errors that leak through at the output due to parameters mismatching between the gyroscope sensing element imperfections and the interface digital modulator are effectively removed. The correction of spectral distortion and gain mismatch in the signal path due to non-ideal signal transfer function is also allowed. The results demonstrate that the proposed adaptive MASH2-0 gyroscope achieves inherent system stability, better dynamic range and better noise performance compared with a common 4th-order single-loop EM-??? gyroscope. |
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