微机电系统技术及其在航天器上的应用展望

微机电系统是指集微型机构、微型传感器、微型执行器以及信号处理和控制电路、各种接口、通信电路和电源等于一体的微型器件或系统。随着科学技术的发展,微机电系统在精度和可靠性方面都有了很大的提高,得到了越来越广泛的应用。论述了微机电系统的技术特征、主要技术和加工工艺,并展望了微机电系统在航天器上的应用前景。

Technology of MEMS and Applications in Spacecraft

Micro-electro-mechanical system(MEMS)is a micro component or a system which is composed of microstructures,micro sensors,micro actuators and signal processing circuits,control circuits,kinds of interfaces,communication cables,power-supplies.As the science and technology develop,MEMS is improved in precision and reliability,and,therefore,is widely used.This paper presents the technical characteristics,key technologies and the manufacture processes of MEMS,Its applications in spacecraft are also addressed.