| 一种远程、多点、实时的洁净度监测系统设计 |
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| 引用本文： | 季启政,顾世红,陈建,何玉俊.一种远程、多点、实时的洁净度监测系统设计[J].宇航计测技术,2009,29(6):41-44,40. |
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| 作者姓名： | 季启政 顾世红 陈建 何玉俊 |
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| 作者单位： | 1. 北京东方计量测试研究所,北京,100086
2. 苏州苏净仪器自控设备有限公司,苏州,215122 |
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| 摘 要： | 为了满足各类实验室不断提高的洁净度监测实时性要求，设计了一种可远程控制、可实时监测、可多点监测、可集中显示、可分析数据的洁净度监测系统。
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| 关 键 词： | 洁净度 监测系统 设计 散射 |
Design of A Long-distance and Multi Point Real-time Monitoring System for the Cleanliness |
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| JI Qi-zheng,GU Shi-hong,CHEN Jian,HE Yu-jun.Design of A Long-distance and Multi Point Real-time Monitoring System for the Cleanliness[J].Journal of Astronautic Metrology and Measurement,2009,29(6):41-44,40. |
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| Authors: | JI Qi-zheng GU Shi-hong CHEN Jian HE Yu-jun |
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| Institution: | JI Qi-zheng GU Shi-hong CHEN Jian HE Yu-jun(1.Beijing Orient Institute of Measurement ＆ Test Chinese Academy of Space Technology, Beijing 100086 ; 2. Suzhou Sujing Instrument Automatic Control Equipment Co, Ltd, 215122) |
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| Abstract: | In order to meet the needs of various laboratories continue to improve the real-time monitoring requirements for the cleanliness, a cleanliness monitoring system are designed, which can long-distance control, can be real-time monitoring, can be multi point monitoring, can focus on the display, can analyze data. |
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| Keywords: | Cleanliness Monitoring system Design Scattering |
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