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多维驱动微型振动平台的研制
引用本文:万德安,丁宇斌,谢长生,陆建军,徐建新. 多维驱动微型振动平台的研制[J]. 宇航计测技术, 2001, 21(6): 39-42
作者姓名:万德安  丁宇斌  谢长生  陆建军  徐建新
作者单位:万德安(同济大学机械系,200092)      丁宇斌(同济大学机械系,200092)      谢长生(同济大学机械系,200092)      陆建军(同济大学机械系,200092)      徐建新(同济大学机械系,200092)
基金项目:中国航天工业总公司先进制造技术"九五"预研项目18.10.4/A990803-02
摘    要:一种以压电元件为驱动源,结合柔性铰链机构的微型振动平台,通过计算机设计控制电压波形,对其进行三维振动控制.通过实验证明,该机构具有良好的波形跟踪性能,易于实现复杂控制波形,适用于微型机械的动态性能测试.

关 键 词:+柔性铰链机构 +压电元件 +微型振动平台
修稿时间:2001-06-18

Development of a Micro-vibration platform
Wan Dean Ding Yubin Xie Changsheng Lu Jianjun Xu Jianxin. Development of a Micro-vibration platform[J]. Journal of Astronautic Metrology and Measurement, 2001, 21(6): 39-42
Authors:Wan Dean Ding Yubin Xie Changsheng Lu Jianjun Xu Jianxin
Affiliation:Wan Dean Ding Yubin Xie Changsheng Lu Jianjun Xu Jianxin
Abstract:A kind of micro vibration platform is presented in this paper. Piezoel ectric element works as its actuator and the displacement of the piezoelectric e lement is magnified by the flexible hinge structure. The control voltage is desi gned through the computer. It can vibrate in three dimensions. Micro machine ca n be tested on this platform. Experiments have identified that the response qual ity and the wave follow quality of this platform are very well and it has micro n scale displacement precision. This micro-vibration platform is compatible to t he dynamic test of the micro machine.
Keywords:Flexible hinge structure Piezoelectric element Micro vibration platform
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